Spencer works in the Center for Nanophase Materials Sciences (CNMS) at ORNL, with a hybrid role in the Nanofabrication Research Laboratory and Functional Atomic Force Microscopy groups. Spencer received his Ph.D in Materials Science and Engineering at UT, and previously received his B.S. and M.S. in Materials Science and Engineering at the University of North Texas. He currently works on the Nonlinear Quantum Materials from Lab-to-Fab for Monolithic Integrated Quantum Photonics LDRD.
Spencer grows thin film materials and fabricates electronic devices, then subsequently modifies the devices using a variety of direct-write techniques at the CNMS (lasers, electron beams, ions/plasmas). He has experience with a variety of technologically relevant materials, such as Transition Metal Dichalcogenides (TMDs) and Transition Metal Oxides (TMOs), nitrides like AlN and h-BN, perovskites like BaTiO3, and graphene and carbon nanotubes.
Presentation Title:
Direct-Write Editing Niobium Superconducting Josephson Junctions and Devices via XeF¬2 Gas Assisted Focused Electron Beam Induced Etching
Presentation Abstract:
In this work, we demonstrated direct-write editing of niobium superconducting thin film devices by focused electron beam induced etching (FEBIE) with the XeF2 precursor. Niobium films of 200 and 50 nm thickness were deposited onto SiO2 coated silicon wafers by magnetron sputtering and fabricated into four-point probe patterns. Directly written FEBIE current crowding Dayem bridge devices were synthesized and characterized. Furthermore, Josephson junctions were fabricated via FEBIE line etches to form a trench across the ≈3.8 μm superconducting channel width. Detailed superconducting transport properties of the devices were characterized.